| Product |
Mono-crystalline |
Multi-crystalline |
| Diagonal |
200,
205,
210±0.5mm |
200, 205, 210±0.5mm |
| Wafer
size |
156±0.5mm | 156±0.5mm |
| Thickness |
200±0.2mm | 200±0.2mm |
| Conductivity
Type |
P
: N |
P : N |
| Dopant |
Boron
: Phos. |
Boron : Phos. |
| Orientation |
<100>
±3 deg |
<100> ±3 deg |
| Resisitivity |
1.0-3.0,
3.0-6.0 ohm.cm |
1.0-3.0, 3.0-6.0 ohm.cm |
| Life Time |
>10
uS |
>10 uS |
| Carbon Con |
<1 E17 at/cm3 | <1 E17 at/cm3 |
| Oxygen Con |
1 E187 at/cm3 | 1 E187 at/cm3 |
| Dislocation Density |
<3000/cm2 |
<3000/cm2 |
| Wafer Surface |
As cut
and cleaned. No grease stains and pin holes |
|