| Size |
2" |
4" |
6" |
| Diameter
(mm) |
50.8±0.25 | 100±0.25 | 150±0.25 |
| Thickness |
430±15µm | 650±15µm | 1330±20µm 900±20µm |
| Orientation |
Plane
[0001] off
angle to M-axis 0.2°±0.1°; 0±1° (A-axis) Other orientation per request |
||
| TTV |
<10µm |
<10µm | <20µm |
| BOW |
<10µm | <30µm | <40µm |
| WARP |
<10µm | <50µm | <50µm |
| Front
Surface roughness |
<3Ǟ |
||
| Back
Surface roughness |
0.8~1.2µm / 1.0~1.4µm | ||
| Cleanliness | Ready for
EPI |
||
| Packaging |
25pcs in
cassette |
||